Review on pressure sensors: a perspective from mechanical to micro-electro-mechanical systems

Micro - Electro - Mechanical - Systems ( Mems )

Fractional Order Control of Micro Electro-Mechanical Systems

This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...

Fractional Order Control of Micro Electro-Mechanical Systems

This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient per...

Waveguide micro-opto-electro-mechanical resonant chemical sensors.

We demonstrate a silicon micro-opto-electro-mechanical sensor based on mass-loading of a chemo-selective polymer coated onto a microbridge. The sensor is probed optically using an on-chip waveguide Fabry-Pérot interferometer for high resolution displacement and resonant frequency measurement. The mechanical resonator is designed with paddles to simplify chemo-selective polymer deposition and to...

Nanofabrication, effects and sensors based on micro-electro-mechanical systems technology.

In this paper, our investigation of nanofabrication, effects and sensors based on the traditional micro-electro-mechanical systems (MEMS) technology has been reviewed. Thanks to high selectivity in anisotropic etching and sacrificial layer processes, nanostructures such as nanobeams and nanowires have been fabricated in top-down batch process, in which beams with thickness of only 20 nm and nan...